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National Repository of Grey Literature 2 records found  Search took 0.01 seconds. 
Selective growth of GaN nanostructures on silicon substrates
 Knotek, Miroslav ; Novák, Tomáš (referee) ; Voborný, Stanislav (advisor)
This thesis deals with deposition of gallium nitride thin films on silicon substrates covered by negative HSQ rezist. Rezist was patterned via electron beam lithography to create masks, where the selective growth of crystals was achieved. Growth of GaN layers was carried out by MBE method. For achievement of desired selective growth, the various deposition conditions were studied.
Detailed record
Selective growth of GaN nanostructures on silicon substrates
 Knotek, Miroslav ; Novák, Tomáš (referee) ; Voborný, Stanislav (advisor)
This thesis deals with deposition of gallium nitride thin films on silicon substrates covered by negative HSQ rezist. Rezist was patterned via electron beam lithography to create masks, where the selective growth of crystals was achieved. Growth of GaN layers was carried out by MBE method. For achievement of desired selective growth, the various deposition conditions were studied.
Detailed record

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